SINTYRON high thermal conductivity corrosion-resistant aluminum nitride wear ceramic ring rod

High-performance Aluminum Nitride (AlN) ceramic components for semiconductor equipment, offering superior thermal conductivity, plasma resistance, and precision machining for critical wafer processing applications.

Email: sintyron@xtlceramic.com

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SINTYRON high thermal conductivity corrosion-resistant aluminum nitride wear

ceramic ring rod

Product descritption:

Density: (3.1~3.3) g/cm3

Processing range: maximum shape 600*600*400mm

Accuracy range: flatness: 0.002mm, parallelism, verticality: 0.005mm, Ra:0.2um

Our precision-engineered Aluminum Nitride (AlN) structural components are critical for

advanced semiconductor manufacturing, offering:
1：220+ W/mK thermal conductivity – 8x better than alumina
2：>1014 Ω·cm volume resistivity – ideal for RF applications
3：CTE matched to silicon wafers (4.5×10⁻⁶/°C)
4：Corrosion-resistant in Cl₂/CF₄ plasma environments

Performance For Industrial Ceramic

Item		Unit	Our standard
Appearance	Color	-	Gray / Beige
	Microstructure	-	Dense and fine grain
	SurfaceRoughness（）	μm	0.46
	Warpage	‰	＜2.5
Physical	Water Absorption	%	0.061
	Vickers Hardness	GPa	12
	Young Modulus	GPa	330
	VolumeDensity	g/Cm3	≥3.24
	BendingStrength	[3-point Method]MPa	＞350
Thermal	@20℃ThermalConductivity	[@20℃]W/m·k	≥170
	CoefficientofLinear Expansion	RT-300℃]10-6mm/℃	4.6
Electrical	Volume Resistance	Ω·cm	1.5×1013
	[@1MHz] Dielectric Constant	-	10.6
	[@1MHz] Dielectric Loss	-	4.6×10-4
	Dielectric Strength	(KV/mm)	≥20

Semiconductor Applications：

Etch Systems：

Plasma confinement rings

Gas distribution plates

Chamber liners

Deposition Tools：

CVD heater pedestals

PVD shield components

Lithography

EUV mirror substrates

Vacuum chuck components

Packaging & Testing

Thermal management substrates

Probe card insulators

Company Information：

FAQ

Why us?
* Professional manufacturer since 1997.
* Strict quality control on production process and tolerance.
* Free samples available
* Customized production based on your drawing or specification
* On-time delivery and reliable support and service
* Inventory available for quick shipment
* We keep confidentiality of all the drawings and business information between us.
Are you a trading company or a manufacturer?
* We are a manufaturer.
Can you provide the free samples?
* Yes,we can offer free sample if we have it in stock,but the courier fee is to be collected.
Do you accept customized production based our specification?
* Yes,we offer OEM and ODM service. Just send us your drawing if you have it. If you don’t have a drawing, just tell us your idea, we will work out the drawing for you.

What's the delivery time?
* 7 working days for standard products 30 days for customized products.
What is the MOQ?
* No limit to the quantity. We can offer the best proposal and solutions according to your condition.
What is the payment terms you accept?
* T/T,LC,Western Union,moneygram are acceptable.
How to deal with the faulty?
* Firstly, Our product are produced in strict quality control system and the defective rate will be less than 2%.
If there are problems with the product, we will provide free replacement.